ILJIN Display


Product : Sapphire

Sapphire - Sapphire Polished wafer , Sapphire wafer Manufacturing technology

A sapphire is a single crystal grown with alumina (Al2O3)at a temperature above 2,050℃. In a similar way, sapphire wafer is a sapphire single crystal cut and polished by diameter to make it suitable for GaN Epi process for LEDs.

Wafers are core materials that affect the light efficiency of LED chips according to the level of processing. They are used in LED chips found in BLUs in TVs and mobile devices, lighting, electronic signboards, traffic lights and automobile lighting.
It is expected to expand its use as a micro LED, attracting attention as a next generation display technology. Micro LED is miniaturized to a 1/50 scale compared to existing LEDs reduces power consumption by 20% compared to OLED. It will increase rapidly to wearable displays for Virtual Reality (VR) and Augmented Reality (AR) in the microdisplay market.increase rapidly to wearable displays for Virtual Reality

Ingot

What Is a sapphire single crystal?
This material grows into a single crystal structure from melting alumina (Al2O3), which is a compound of aluminum (Al) and oxygen (O), at temperatures higher than 2,050℃ before then solidifying.

sapphire single crystal

The strongest hardness
on Earth after diamonds
Sapphire single crystals have the strongest hardness on Earth after diamonds. They are about 10 times higher in abrasion resistance and corrosion resistance than quartz, and have excellent insulating characteristics and optical transparency.

sapphire single crystal

Physical Properties Value
Crystal structure Hexagonal system (rhombohedral)
Unit cell dimension a = 4.758 Å , c = 12.991 Å
Density 3.98g/cm3
Hardness 9 mohs, 1,525-2,000 Knoop
Tensile strength 400MPa (at 25℃) 275MPa (at 500℃) 345MPa(at 1,000℃)
Flexural strength 2,500~4,000 MPa
Thermal Properties Value
Thermal conductivity (at 300K) 23.1 W/m·K (perpendicular to c-axis) / 25.2 W/m·K (parallel to c-axis)
Specific heat 105 J/kg·K at 91K / 761 J/kg·K at 291K
Thermal coefficient of linear expansion (at 323K) 6.66 x 10-6 ./K(parallel to optical axis)
5 x 10-6 /K (perpendicular to optical axis)
Melting point 2,050 °C
Boiling point 2,980 °C
Comparison of sapphire single crystal growth methods
Advanced Kyropoulos Growth Method - For this new growth method based on the Kyropoulos growth method developed in Russia, Iljin Display has improved its chamber and insulation structure through its own research and development.

Sapphire growth methods

Growth Method VHGF HEM Kyropoulos Advanced Kyropoulos
Ingot Size 2~6inch 2~8inch 2~8inch 2~8inch
Ingot Smoothing Quality Good Good Excellent Excellent
Bubbles Moderate Moderate Moderate Moderate
Lineage Good Poor Good Excellent
Crystalline Excellent Good Excellent Excellent
Insulation Property Excellent Excellent Poor Poor
Power Consumption Low Low Medium Medium
Man Hour Moderate Moderate Large Large
Maintenance Cost Medium High High High
Productivity Good Excellent Good Good
Manufacturing Cost Good Good Good Good

Specifications

Specifications

Property Unit 4” 6”
Diameter mm 100.05±0.02 150.05±0.05
Orientation - c–Plane (0001) a–Plane (11-20)
r–Plane (10-12) m–Plane (10-10)
Orientation Tilt Tolerance Degree 0±0.05 0±0.05
Flat length mm 30.7±0.5 Notch 25~50±1.0 Notch
Usable Length Max 220 Max 200
Surface finish mm As cored Fine Ground
Crystal Quality - No Grain Boundaries, Twins, Lineages, or Crack
Picture - 4”, 6” 이미지

Wafer (LED)

Single Crystal Sapphire Polished wafer

After the extraction of ingots by coring single crystal boules according to the required diameters and orientations, sapphire wafers are cut into the shape of the substrate using diamond wires. The as-cut substrate is uniformly shaped through the edge and lapping processes, and the surface stress is removed through the heat treatment process. The substrate is then polished to a surface roughness of 2Å and fabricated to be suitable for the GaN Epi process for LEDs.

Diamond hardened material
Excellent abrasion resistance, corrosion resistance,
insulation properties and transmittance

Sapphire wafer

Property Remarks
Mechanical Characteristics Mohs 9 A sapphire wiper is second only to diamonds in hardness and is resistant to scratches.
Temperature Characteristics Thermal conductivity 25.12W/M/K (100℃) A sapphire wiper is one of ceramic materials with thermal conductivity similar to metal. It changes minimally even when exposed to extremely hot and cold temperatures.
Optical Characteristics Transmittance 85% It has excellent transmittance in an even wavelength range.
Optimum design for high flatness without warpage in high temperature process
To fabricate a high flatness sapphire wafer in the lapping process, the optimal conditions of the vertical and horizontal rotation ratios of the two-sided equipment are designed, and the shape of the substrate is made concentric with uniform processing. These substrates minimize non-uniform bending during the Epi process in high temperature environments.

Sapphire wafer In the CMP process, polishing with Nano Silica Slurry is performed to make the surface roughness of the substrate to 2Å.

Specifications

Sapphire SSP(Single Side Polished) Wafer
Sapphire DSP(Double Side Polished) Wafer

Specifications

NO Parameters Unit 2”(50.8mm) 4”(100.0mm) 6”(150.0mm)
Common Specifications 1 Surface Orientation - C-plane (0001) off-set
1-1 Off Angle to M-axis degree(˚) 0.20° ± 0.05° 0.20° ± 0.05° 0.20° ± 0.05°
1-2 Off Angle to A-axis degree(˚) 0.00° ± 0.10° 0.00° ± 0.10° 0.00° ± 0.10°
2 Flat or Notch Orientation degree(˚) A-plane(11-20) _ 0 ± 0.20
3 Thickness 430 ± 10 650 ± 10 650 ± 10
4 TTV / LTV ≤ 5 / ≤ 2 ≤ 5 / ≤ 2 ≤ 5 / ≤ 2
5 Roughness(Ra)-Front side ≤ 0.2 ≤ 0.2 ≤ 0.2
SSP 6 Bow -10 ~ 0 -10 ~ 0 -10 ~ 0
7 Roughness(Ra)-Back side 0.6 ~ 1.2 0.6 ~ 1.2 0.6 ~ 1.2
DSP 8 Bow ± 5 ± 10 ± 10
9 Roughness(Ra)-Back side ≤ 0.2 ≤ 0.2 ≤ 0.2

2~6 “SSP Applicable products(Flash LED/LED), 2~6 “DSP Applicable products(Lightning/Backlight unit/Automative)

Wafer(Micro-LED)

Next-generation display
elements, Micro-LED

In the display business, LED elements with superior power consumption, color gamut, brightness, contrast, life-time and durability are next-generation display elements that achieve chip sizes of less than 100μm compared to conventional LCDs and LEDs. By mounting these micro-LEDs to TFT Backplanes, they are expected to be widely used in Flexible Displays, especially in wearable displays for AR and VR, as well as in medical devices.

LED and ㎛ LED

Sapphire substrates required for
Micro-LED applications

In a micro-LED display, a defect of sapphire significantly affects the chip transference number. It is thus expected that the physical and characteristic enhancement of the sapphire substrate is required. Based on our business strengths, we are pursuing the development of next-generation display materials with leading domestic and global customers with the goal of achieving superior quality and customer satisfaction by providing the world's highest quality ingots and wafers.

2017 ~ 2024 UDS Billion

Property Parameters Unit 6 inch WF
Flatness Characteristics TTV / LTV um ≤ 4 / ≤ 2
BOW / Warp um -6 ~ 0 / ≤ 7
Appearance Characteristics Chip, Crack, Pore - None
Surface Characteristics Particle, Stain, Scratch - None

6” SSP Applicable products(Medical, Wearable, Automotive)

Window/Lens

Single Crystal Sapphire Window
After coring single crystal boules into cylindrical or extracting ingots with brick shapes, sapphire wafers are cut into the shape of substrate using diamond wires. After this, shape processing and double-sided polishing are carried out to make them suitable for each application type and size.

Single Crystal Sapphire Window

Property Design Preference for Window Application Sapphire Tempered Glass
Mechanical Property ★★Material Al2O3 Anisotropy SiO2 Isotropy
★★Density(g/cm3) Weight Lightening 3.97 2.42
★★Hardness Mohs Anti Scratch 9 7
Vickers (kg/mm2) 1,940~2,200 534 ~ 649
Impact Test(N) Endurance 1,060 198
★★Bending Test(N) 1,540 673
Yong’s Elastic Modulus(GPa) Flexible 345 72
Thickness(mm) Slim 0.26mm 0.4mm
★Contact Angle(˚) Wettability, Coatability for AF, AR, BM 100~110° 50~60°
Electrical Property Dielectric Constant Sensitivity 9.3 ~ 11.5 7.24
★★Refractive Index(550nm) Outdoor Visibility 1.65 1.5
Optical Property ★★ Transmittance Bare Visibility 85% 91.50%
AR coated 91.00% -
Simplify process and manufacture various window products with fast production speed Excellent strength of substrate by high-temperature heat treatment at 1,400 ℃ for 20hr or more

Our window substrates are optimized for manufacturing various kinds of window products thanks to the high production rate by adopting the simplified process of double-sided polishing technology. In addition, surface roughness and scratch level are equivalent to those of LED products by conducting final polishing on the surfaces with Silica Slurry for LEDs. Although a sapphire can be easily broken by external impact due to its material characteristics, our company performs high-temperature heat treatment at 1,400℃ for 20 hours or more so that the substrates are high strength and resistant to impact and breakage.

Sapphire Window - Colloidal silica

Sapphire window
specifications

Sapphire Window specifications

No Parameters Unit Cover glass Lens
1 Thickness ≥ 500 ± 20 ≥ 300 ± 20
2 TV5 ≤ 20 ≤ 5
3 Surface Roughness(Ra) ≤ 0.5 ≤ 0.5
4 Edge Bevel customize
5 Surface shape -
6 Surface Round -
7 Diameter
8 Step Thickness

Smart Watch Applicable products, CAMERA LENSE Applicable products(Smart phone camera lens)


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